Non-destructive imaging of organosilicate glass (OSG) thin films at low voltage with the EsB detector

  1. Garitagoitia Cid, A.
  2. Moayedi, E.
  3. Rosenkranz, R.
  4. Clausner, A.
  5. Pakbaz, K.
  6. Zschech, E.
Revue:
IEEE Transactions on Device and Materials Reliability

ISSN: 1558-2574,  1530-4388

Année de publication: 2016

Volumen: 16

Número: 4

Pages: 461-464

Type: Article

DOI: 10.1109/TDMR.2016.2628166 GOOGLE SCHOLAR

Objectifs de Développement Durable

La source de données: Scopus