Non-destructive imaging of organosilicate glass (OSG) thin films at low voltage with the EsB detector

  1. Garitagoitia Cid, A.
  2. Moayedi, E.
  3. Rosenkranz, R.
  4. Clausner, A.
  5. Pakbaz, K.
  6. Zschech, E.
Aldizkaria:
IEEE Transactions on Device and Materials Reliability

ISSN: 1558-2574 1530-4388

Argitalpen urtea: 2016

Alea: 16

Zenbakia: 4

Orrialdeak: 461-464

Mota: Artikulua

DOI: 10.1109/TDMR.2016.2628166 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak