Non-destructive imaging of organosilicate glass (OSG) thin films at low voltage with the EsB detector

  1. Garitagoitia Cid, A.
  2. Moayedi, E.
  3. Rosenkranz, R.
  4. Clausner, A.
  5. Pakbaz, K.
  6. Zschech, E.
Journal:
IEEE Transactions on Device and Materials Reliability

ISSN: 1558-2574,  1530-4388

Year of publication: 2016

Volume: 16

Issue: 4

Pages: 461-464

Type: Article

DOI: 10.1109/TDMR.2016.2628166 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus